Definition
Leak detection is the process of locating or measuring unintended gas flow through openings or imperfect seals in a vacuum or pressure system.
Application
Used on semiconductor vacuum chambers, gas-delivery systems, process tools, and sealed components; helium tracer gas with mass-spectrometer detection is a common high-sensitivity method.
Related search terms
vacuum leak detection; helium leak detection
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Related concepts
Evidence and further reading
- Evidence from leybold.comhttps://www.leybold.com/en/knowledge/vacuum-fundamentals/leak-detection/mass-spectrometer-leak-detectors-operating-principle
- Evidence from leybold.comhttps://www.leybold.com/en-us/knowledge/vacuum-fundamentals/leak-detection/benefits-of-helium-as-a-tracer-gas
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.