Definition
Partial pressure is the contribution of an individual gas species to the total pressure of a gas mixture; for an ideal mixture, p_i = x_i p.
Application
Used to quantify and control individual process-gas species in vacuum, deposition, etch, and contamination-control environments where gas composition affects process behavior.
Related concepts
Evidence and further reading
- Evidence from goldbook.iupac.orghttps://goldbook.iupac.org/terms/view/P04819
- Evidence from nist.govhttps://www.nist.gov/laboratories/tools-instruments/beamline-8-surface-chemistry-durability-euv-optics
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.