Definition
A localized enclosed or physically separated ultra-clean zone within or around semiconductor handling or process equipment that maintains tighter contamination control than the surrounding cleanroom.
Application
Used around contamination-sensitive wafer handling and processing to reduce particle exposure without requiring the entire surrounding ballroom to operate at the same cleanliness level.
Related search terms
mini environment
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/node/167181
- Evidence from connect2cleanrooms.comhttps://connect2cleanrooms.com/resources/knowledge-base/mini-environments/