Definition
Unwanted organic or carbon-containing molecular residue present on a semiconductor wafer, process surface, material, or tool environment.
Application
Controlled through wafer cleaning and contamination management because organic residues and molecular contamination can contribute to pattern defects, electrical degradation, yield loss, or reliability problems.
Related search terms
organic residue; carbon contamination
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Related concepts
Evidence and further reading
- Evidence from semiconductor.samsung.comhttps://semiconductor.samsung.com/support/tools-resources/dictionary/zero-residue-zero-contaminants-semiconductor-cleaning/
- Evidence from nist.govhttps://www.nist.gov/system/files/documents/pml/div683/conference/full_program_download.pdf