Definition
Compressed air that has been dried and filtered or purified to control moisture, particles and other contaminants for use as a clean utility or purge gas in semiconductor manufacturing.
Application
Used for equipment pneumatics, wafer-handling systems and purge applications, including lithography-tool and carrier environments where moisture or molecular contamination from ordinary plant air would be unacceptable.
Related search terms
Compressed dry air; clean compressed dry air
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Related concepts
Evidence and further reading
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-purifiers/GateKeeper-Z2-Series-Gas-Purification-Systems/p/GateKeeperZ2SeriesGasPurificationSystems
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-purifiers/MegaTorr-PS22-XCDA-Gas-Purifiers/p/GateKeeperMGTAutoRegenerableExtremeCleanDryAirGasPurifiers