Definition
In semiconductor gas delivery, an enclosed assembly of valves and manifold branches that distributes process gas from a supply to multiple tools or points of use.
Application
Provides branch-level gas distribution and isolation for semiconductor fabrication equipment.
Related concepts
Evidence and further reading
- Evidence from appliedenergysystems.comhttps://www.appliedenergysystems.com/semi-gas-systems-updates-semi-automatic-valve-manifold-box-design/
- Evidence from criticalsystemsinc.comhttps://www.criticalsystemsinc.com/vmbs-vmps