Definition
A vacuum or process-gas analyzer, commonly based on a quadrupole mass spectrometer, that separates detected gas species by mass-to-charge ratio to characterize gas composition and partial pressures.
Application
Used on semiconductor vacuum tools for leak detection, gas-purity checks, hydrocarbon or contamination monitoring, chamber-condition monitoring, and process diagnostics.
Related search terms
Residual gas analysis; Quadrupole residual gas analyzer
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Related concepts
Evidence and further reading
- Evidence from inficon.comhttps://www.inficon.com/en/products/gas-analysis/transpector-cpx
- Evidence from inficon.comhttps://www.inficon.com/en/products/gas-analysis/transpector-xpr3