Definition
The prescribed sequence and behavior for putting on cleanroom garments and entering controlled areas while minimizing contamination transfer.
Application
Used before semiconductor cleanroom entry to protect wafers, tools, and processes from particles and other contamination carried by personnel.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/document/cnst-nanofab-safety-manual
- Evidence from nist.govhttps://www.nist.gov/document/cleanroomlabmanualpdf