Definition
A measurement-system study that quantifies variation attributable to repeatability and reproducibility components of the measurement process.
Application
Used in semiconductor metrology to determine whether measurement variation is small enough to distinguish real process or product variation.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/nistsematech-engineering-statistics-handbook-chapter-2-measurement-process
- Evidence from mdpi.comhttps://www.mdpi.com/2227-7390/14/13/2355