Definition
A binary Graphic Data System II layout format that represents planar geometric shapes and related layout data for integrated-circuit and nanofabrication patterns.
Application
Used to exchange mask/layout geometry between IC design or CAD tools and pattern-generation or lithography workflows.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/services-resources/software/cnst-nanolithography-toolbox
- Evidence from nist.govhttps://www.nist.gov/cnst/nanofab-software-releases