Definition
A patterned mask used as the circuit-pattern master in a projection lithography system.
Application
Supplies the pattern projected onto wafer photoresist, with repeated exposures reproducing the pattern at multiple wafer locations.
Related search terms
mask; lithography mask
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/technology/lithography-principles
- Evidence from global.canonhttps://global.canon/en/technology/canon-tech/tech/semicon/