Definition
Reduction or destruction of greenhouse-gas emissions from semiconductor process exhaust, especially high-GWP fluorinated gases used in etch and chamber cleaning.
Application
Applied to fab exhaust using process optimization, gas substitution, or thermal, catalytic, or plasma abatement systems to reduce fluorinated-GHG emissions.
Related concepts
Evidence and further reading
- Evidence from epa.govhttps://www.epa.gov/eps-partnership/semiconductor-industry
- Evidence from epa.govhttps://www.epa.gov/ghgreporting/subpart-i-information-sheet