Definition
Hydrogen bromide (HBr) is a halogen-containing process gas used in semiconductor plasma etching, particularly for silicon and polysilicon pattern transfer.
Application
HBr-based etch chemistries are used for anisotropic silicon/polysilicon features such as gates and other structures where profile control and selectivity to oxide are important.
Related search terms
hydrogen bromide etch
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Related concepts
Evidence and further reading
- Evidence from snfguide.stanford.eduhttps://snfguide.stanford.edu/guide/gases/hydrogen-bromide
- Evidence from lnf-wiki.eecs.umich.eduhttps://lnf-wiki.eecs.umich.edu/wiki/LAM_9400/Processes/POLY_ETCH_2