Definition
Hydrogen chloride (HCl) is a corrosive hydrogen-halide chemical used in semiconductor processing as hydrochloric-acid chemistry or as a process gas, depending on the operation.
Application
In wafer cleaning, HCl is a component of RCA/Standard Clean 2 chemistry used to remove metallic contamination from silicon surfaces; process-specific gas uses should be separately qualified.
Related search terms
hydrochloric acid; hydrogen chloride gas
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Related concepts
Evidence and further reading
- Evidence from nanofab.ubc.cahttps://nanofab.ubc.ca/capabilities/processes/cleaning/rca-2-si-wafer-cleaning/
- Evidence from nanoguide.stanford.eduhttps://nanoguide.stanford.edu/guide/chemicals/acids