Definition
Interface state density is the density of electrically active electronic states at or near a semiconductor/dielectric interface, commonly expressed per unit area and energy.
Application
Dit is extracted from MOS measurements to assess interface quality because interface states can exchange charge with the semiconductor and degrade threshold behavior, mobility, subthreshold response, and reliability.
Related search terms
interface trap density; interface-state density
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/energy-distribution-interface-traps-high-k-gated-mosfets
- Evidence from nist.govhttps://www.nist.gov/publications/asymmetric-energy-distribution-interface-traps-n-p-mosfets-hfo2-gate-dielectric-ultra