Definition
Ion milling is a physical dry-etch process in which an accelerated, typically inert ion beam bombards a surface and sputters atoms from the material.
Application
Used for directional removal and profile shaping of metals, dielectrics, magnetic films, and other materials when chemically selective plasma etching is unsuitable.
Related search terms
ion beam milling; ion beam etching
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Related concepts
Evidence and further reading
- Evidence from jeol.comhttps://www.jeol.com/words/emterms/20121023.002200.php
- Evidence from plasma.oxinst.comhttps://plasma.oxinst.com/technologies/ion-beam-etching