Definition
Etching in which material removal is strongly direction-dependent, typically favoring the vertical direction so the transferred pattern has relatively steep sidewalls.
Application
Used to form contacts, trenches, vias and high-aspect-ratio features where lateral etching must be limited to preserve critical dimensions and profile shape.
Related search terms
Directional etch
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Related concepts
Evidence and further reading
- Evidence from newsroom.lamresearch.comhttps://newsroom.lamresearch.com/New-Atomic-Layer-Etching-Capability-Enables-Continued-Device-Scaling
- Evidence from newsroom.lamresearch.comhttps://newsroom.lamresearch.com/understanding-cfets-transistor-architecture