Definition
Physical or electronic manufacturing record that accompanies or tracks a wafer lot through its process route while maintaining lot identity and process-history correlation.
Application
Used in fab operations and MES workflows for lot traceability, genealogy, WIP tracking, and recording manufacturing execution data.
Related search terms
wafer lot traveler; traveler
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Related concepts
Evidence and further reading
- Evidence from patents.google.comhttps://patents.google.com/patent/EP1062618A4/en
- Evidence from siemens.comhttps://www.siemens.com/fi-fi/products/opcenter/execution/semiconductor/