Definition
Microelectromechanical systems are microfabricated devices that combine mechanical structures with electrical or electronic functionality, often serving as sensors or actuators.
Application
Used in inertial, pressure, acoustic, timing, RF, microfluidic, and other sensing/actuation applications manufactured with IC-related microfabrication methods.
Related search terms
microelectromechanical systems; micro-electro-mechanical systems
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/mems
- Evidence from nist.govhttps://www.nist.gov/programs-projects/micro-and-nanoelectromechanical-systems