Definition
Pattern transfer is the process of transferring a lithographically defined resist or mask pattern into an underlying material stack, typically by selective etching.
Application
Used after lithography to form semiconductor device and interconnect features while controlling critical dimensions and preserving pattern fidelity.
Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/pattern-transfer-of-directed-self-assembly-patterns-for-cmos-device-applications
- Evidence from pubs.acs.orghttps://pubs.acs.org/doi/10.1021/acs.nanolett.9b01911