Definition
Pattern fidelity is the degree to which a fabricated or transferred lithographic pattern preserves the intended feature dimensions and shape.
Application
Measured and controlled in lithography and pattern transfer to detect dimensional or shape deviations that can degrade device pattern accuracy.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/pattern-fidelity-nanoimprinted-films-using-cd-saxs
- Evidence from research.ibm.comhttps://research.ibm.com/publications/pattern-transfer-of-directed-self-assembly-patterns-for-cmos-device-applications