Definition
Etching is the selective removal of material from a semiconductor wafer to transfer a pattern or shape device structures. Semiconductor etch may use wet chemical reactions or dry/plasma processes such as reactive-ion etching.
Application
Etch steps define conductors, dielectrics, contacts, vias, trenches, and high-aspect-ratio structures after lithography, with process choices balancing rate, selectivity, anisotropy, profile control, and damage.
Related search terms
Semiconductor etch; wafer etch
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Related concepts
Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/products/our-processes/etch/
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/semiconductor/products/processes/etch.html