Definition
Per- and polyfluoroalkyl substances (PFAS) are a broad class of fluorinated chemicals defined by their fluorinated carbon structures; individual PFAS can have very different properties and functions.
Application
In semiconductor manufacturing, specific PFAS are used in applications such as photoacid-generator chemistry, surfactants, plasma-enabled etch/deposition processes, heat-transfer fluids, and release-related functions.
Related concepts
Evidence and further reading
- Evidence from semiconductors.orghttps://www.semiconductors.org/pfas/
- Evidence from semiconductors.orghttps://www.semiconductors.org/pfas-containing-surfactants-used-in-semiconductor-manufacturing/