Definition
A photoacid generator (PAG) is a component of chemically amplified photoresist that generates or activates acid in response to exposure; the acid then catalyzes resist chemistry during post-exposure processing.
Application
Used in chemically amplified DUV and EUV resists to convert exposure energy into acid-driven chemical changes that create development contrast and enable pattern formation.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/chemical-mapping-patterned-polymer-photoresists-near-field-infrared-microscopy
- Evidence from research.ibm.comhttps://research.ibm.com/publications/acid-catalyzed-single-layer-resists-for-arf-lithography