Definition
Preventive maintenance is planned or predictively timed maintenance intended to keep semiconductor manufacturing equipment available and reduce unscheduled downtime.
Application
Used in semiconductor fabs to coordinate maintenance with production schedules and perform repeatable tool-maintenance tasks that improve productivity and reduce production downtime.
Related search terms
Preventative maintenance; Scheduled maintenance
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/products/customer-support
- Evidence from lamresearch.comhttps://www.lamresearch.com/product/dextro/
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.