Definition
Process capability is the statistical ability of a stable, in-control process to produce a measured characteristic within its engineering specification limits, based on the relationship between natural process variation and the allowed specification range.
Application
Used in semiconductor manufacturing to judge whether a controlled unit process or measured output has sufficient variation margin to meet specifications and to prioritize process improvement when its natural spread is too large.
Related search terms
Process capability analysis; Process capability study
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Related concepts
Evidence and further reading
- Evidence from itl.nist.govhttps://www.itl.nist.gov/div898/handbook/pmc/section1/pmc16.htm
- Evidence from asq.orghttps://asq.org/quality-resources/process-capability