Process Capability Index

12 Metrology, Inspection & Characterization

Notation Cp; Cpk

Definition

A process capability index is a dimensionless statistic that compares process variation with specification limits; indices such as Cp describe potential capability from spread, while Cpk also reflects how the process mean is centered within the limits.

Application

Used to summarize and compare the capability of stable semiconductor manufacturing processes, track improvement, and identify processes whose variation or centering leaves inadequate specification margin.

Related search terms

Capability index; Process capability metric

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