Definition
Recovery and purification of water from wastewater for subsequent reuse.
Application
Used to recover industrial wastewater for wafer-fabrication water supplies and reduce tap-water demand.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2023-12/CompilationTerms1023.pdf
- Evidence from esg.tsmc.comhttps://esg.tsmc.com/en-US/articles/133