Definition
An etch stop is a material layer, interface, or process condition intentionally used to halt or sharply slow material removal when an etch reaches a target depth or layer, relying on high selectivity or endpoint control relative to adjacent materials.
Application
In semiconductor pattern transfer, an etch-stop layer protects underlying structures and helps control recess or trench depth when a stack contains materials with sufficiently different etch responses.
Related search terms
Etch-stop layer; stop layer
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Related concepts
Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/products/our-processes/etch/
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/semiconductor/products/processes/etch.html