Definition
In insulated-gate transistors, unintended current that flows through or across a transistor gate dielectric, commonly by tunneling when the dielectric is extremely thin.
Application
Tracked as an off-state and reliability metric because excessive gate leakage raises standby power and can interfere with electrical characterization.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/news-events/news/2015/05/new-chip-defect-finding-scheme-attracts-industry-leaders
- Evidence from intel.comhttps://www.intel.com/pressroom/kits/advancedtech/doodle/ref_HiK-MG/high-k.htm