Definition
A material, defect region, or engineered sink that preferentially captures unwanted impurities or gases away from a sensitive semiconductor region.
Application
Used to immobilize metallic contaminants or residual species so they are less likely to degrade device-active regions or vacuum environments.
Related concepts
Evidence and further reading
- Evidence from technav.ieee.orghttps://technav.ieee.org/topic/gettering/
- Evidence from onlinelibrary.wiley.comhttps://onlinelibrary.wiley.com/doi/abs/10.1002/pssa.201900220