Definition
A contamination-control process that drives and traps unwanted impurities at designated sinks away from semiconductor device-active regions.
Application
Used in silicon wafer processing to reduce electrically harmful metallic contamination and improve minority-carrier lifetime, leakage, yield, or reliability.
Related concepts
Evidence and further reading
- Evidence from technav.ieee.orghttps://technav.ieee.org/topic/gettering/
- Evidence from onlinelibrary.wiley.comhttps://onlinelibrary.wiley.com/doi/abs/10.1002/pssa.201900220