Definition
A measure of the characteristic dimensions of individual crystalline grains in a polycrystalline material or thin film.
Application
Monitored in semiconductor metallization and functional films because grain size can influence resistivity, mechanical behavior, diffusion, and reliability.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/experimental-and-simulation-studies-resistivity-nanoscale-copper-films
- Evidence from nist.govhttps://www.nist.gov/publications/resistivity-nanometer-scale-films-and-interconnects-model-and-simulation