Definition
Ion energy distribution is the statistical distribution of kinetic energies of ions arriving at a surface or measurement point in a plasma process.
Application
IED measurements and models are used to relate RF bias and plasma conditions to ion bombardment, helping engineers control etch profiles, surface reactions, selectivity, and damage.
Related search terms
ion-energy distribution; IEDF
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/ion-energy-distribution-and-optical-measurements-high-density-inductively-coupled-0
- Evidence from nist.govhttps://www.nist.gov/publications/measurements-and-modeling-ion-energy-distributions-high-density-radio-frequency-biased