Definition
A defined set of instructions and parameters that tells a semiconductor metrology instrument what wafer locations or structures to measure and how to acquire and process the measurement data.
Application
Used to standardize repeatable measurements across wafers and lots by specifying sites, tool settings, pattern recognition, algorithms, and analysis conditions.
Related search terms
measurement recipe
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Related concepts
Evidence and further reading
- Evidence from patents.google.comhttps://patents.google.com/patent/US7631286B2/en
- Evidence from patents.google.comhttps://patents.google.com/patent/US7254458B2/en