Optical Microscopy

12 Metrology, Inspection & Characterization

Definition

Microscopy that forms magnified images using visible-light optics and selectable contrast modes such as brightfield, darkfield, differential-interference contrast, or polarization.

Application

Used for rapid semiconductor wafer, reticle, package, and device inspection, alignment, defect review, and dimensional or surface observations within optical-resolution limits.

Related search terms

light microscopy

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Related concepts

Evidence and further reading

  • Evidence from industry.nikon.comhttps://industry.nikon.com/en-us/products/industrial-microscopy/industrial-microscopes/upright-eclipse-l300nd-l300n-l200nd-l200n/
  • Evidence from zeiss.comhttps://www.zeiss.com/microscopy/en/l/great-britain/campaigns/2025/unlocking-innovation-ai-and-automation-in-wafer-solutions.html