Definition
A material property that relates electric displacement to the applied electric field; in anisotropic materials it can be represented by a tensor rather than a single scalar.
Application
Used in semiconductor device and materials modeling and measurement to characterize dielectric response, including the permittivity of silicon and insulating films.
Related concepts
Evidence and further reading
- Evidence from ctcms.nist.govhttps://www.ctcms.nist.gov/~langer/oof2man-draft/Property-Electric-DielectricPermittivity-Anisotropic-Tetragonal.html
- Evidence from nist.govhttps://www.nist.gov/publications/near-field-microwave-microscope-measurements-characterize-bulk-material-properties