Definition
The dimensionless relative permittivity of a dielectric material, equal to its permittivity divided by the permittivity of free space and commonly represented by k or εr.
Application
Used to determine electric-field and capacitance behavior in semiconductor structures; low-k dielectrics reduce parasitic interconnect capacitance, while high-k dielectrics provide high gate capacitance without requiring an equivalently thin physical film.
Related search terms
Relative permittivity; k value
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/relative-permittivity-and-refractive-index
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/eu/en/product-library/producer-black-diamond-pecvd.html