Definition
An intermetal dielectric (IMD) is the insulating dielectric material separating metal interconnect lines or metal wiring levels in the BEOL stack.
Application
IMD layers electrically isolate metal wiring while their dielectric constant, mechanical properties, and integration quality influence RC delay, crosstalk, patterning, and interconnect reliability.
Related search terms
inter-metal dielectric; metal-level dielectric
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Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/porous-organosilicates-low-dielectric-films-for-high-frequency-devices
- Evidence from nist.govhttps://www.nist.gov/publications/thin-films-microelectronics-and-photonics-physics-mechanics-characterization-and