Definition
An interlayer dielectric (ILD) is an insulating dielectric layer used between conductive or device levels in an integrated-circuit stack.
Application
ILD materials electrically isolate neighboring wiring levels and are patterned for contacts or vias; low-k ILDs are used to reduce parasitic capacitance in dense interconnect structures.
Related search terms
inter-layer dielectric; interlevel dielectric
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Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/fully-encapsulated-fine-pitch-dual-damascene-organic-rdl-with-low-dk-df-photosensitive-polyimide-and-its-reliability
- Evidence from nist.govhttps://www.nist.gov/publications/direct-patterning-nanoporous-interlayer-dielectric-insulator-films-nanoimprint