Definition
An interconnect is the conductive wiring and contact/via network that electrically connects transistors and other circuit elements within an integrated circuit or package.
Application
BEOL integration builds multilevel interconnects from metals, liners, vias, and dielectrics to distribute signals and power while controlling resistance, capacitance, and reliability.
Related search terms
on-chip interconnect; BEOL wiring
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Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-demonstrates-16nm-pitch-ru-lines-record-low-resistance-obtained-using-semi-damascene
- Evidence from imec-int.comhttps://www.imec-int.com/en/articles/imec-demonstrates-semi-damascene-interconnects-fully-self-aligned-vias-18nm-metal-pitch