Photoluminescence

12 Metrology, Inspection & Characterization

Definition

Photoluminescence is luminescence produced after a material absorbs optical radiation, often at a longer wavelength than the excitation; the emission can have prompt or delayed components.

Application

Used to characterize semiconductor materials and structures by analyzing emitted spectra for composition, defects, electronic transitions, and process-related material quality.

Related concepts

Evidence and further reading