Definition
A planar MOSFET is the conventional flat, single-plane MOS transistor architecture in which the gate/channel structure is formed substantially along the wafer surface, unlike non-planar FinFET or tri-gate devices.
Application
Used as the traditional CMOS transistor architecture and as a reference structure for comparing electrostatics, scaling, performance, and process integration with non-planar transistor designs.
Related concepts
Evidence and further reading
- Evidence from intel.comhttps://www.intel.com/pressroom/archive/releases/2002/20020919tech.htm
- Evidence from research.ibm.comhttps://research.ibm.com/publications/a-general-approach-for-the-performance-assessment-of-nanoscale-silicon-fets