Definition
Raman spectroscopy is an optical spectroscopy technique that measures the small inelastic frequency shifts of light scattered from a material, producing vibrational signatures that depend on composition, bonding, crystal structure, stress, and related material state.
Application
Used for non-destructive semiconductor materials characterization, including identification of phases and crystallinity and mapping of stress or strain in silicon and thin-film or microstructured materials.
Related search terms
Raman analysis; Raman scattering spectroscopy
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/mml/mmsd/nanomechanical/confocal-raman-microscopy-platform-mapping-stress-materials
- Evidence from nist.govhttps://www.nist.gov/publications/crystalline-quality-bonded-silicon-insulator-characterized-spectroscopic-ellipsometry