Definition
An etch process chosen to remove a target material preferentially while limiting removal of other exposed materials under specified process conditions.
Application
Used for steps such as silicon-germanium removal in gate-all-around transistor fabrication while limiting loss of neighboring materials.
Related search terms
selective etching
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Related concepts
Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/product/selective-etch-product-family/
- Evidence from plasma.oxinst.comhttps://plasma.oxinst.com/technologies/atomic-layer-etching