Definition
The use of computer simulation to develop and optimize semiconductor fabrication processes and devices.
Application
Used to predict fabricated structures and device behavior when evaluating process and device-design options before manufacturing.
Related concepts
Evidence and further reading
- Evidence from iue.tuwien.ac.athttps://www.iue.tuwien.ac.at/phd/ellinghaus/html_diss_cse1.html
- Evidence from synopsys.comhttps://www.synopsys.com/manufacturing/tcad.html