Definition
Process simulation is the numerical modeling of semiconductor fabrication steps to predict how operations such as implantation, diffusion, oxidation, epitaxy, deposition, etching, or planarization change material structure, geometry, dopant profiles, and related physical state.
Application
Used in technology development and process integration to explore process conditions and structures before fabrication, reduce experimental cycles, understand interactions and variation, and provide structures for subsequent device simulation.
Related search terms
TCAD process simulation; Fabrication process simulation
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Related concepts
Evidence and further reading
- Evidence from synopsys.comhttps://www.synopsys.com/manufacturing/tcad/process-simulation/sentaurus-process.html
- Evidence from silvaco.comhttps://silvaco.com/wp-content/uploads/product/pdf/VictoryProcess_brief.pdf