Definition
Process integration is the engineering of the complete semiconductor fabrication sequence so that individual unit processes, materials, device structures, and interfaces work compatibly with the steps before and after them and together meet device and manufacturability targets.
Application
Used to develop and optimize end-to-end flows, resolve interactions between modules, sequence thermal and patterning steps, manage integration tradeoffs, and achieve target device performance, reliability, variability, and yield.
Related search terms
Semiconductor process integration; Process sequence integration
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Related concepts
Evidence and further reading
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-announces-first-process-sequence-integration
- Evidence from synopsys.comhttps://www.synopsys.com/manufacturing/tcad/process-emulation.html