Definition
A form of secondary ion mass spectrometry that analyzes ions ejected from a surface by primary-ion bombardment, using their flight times to determine mass-to-charge ratios.
Application
Used to identify surface contamination on patterned wafers and map the surface distribution of chemical species.
Related search terms
Time-of-Flight Secondary Ion Mass Spectrometry
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Related concepts
Evidence and further reading
- Evidence from images.philips.comhttps://images.philips.com/is/content/PhilipsConsumer/PDFDownloads/United%20Kingdom/Innovationlabs/ODLI20170302_001-UPD-en_GB-material-analysis-ssims.pdf
- Evidence from imws.fraunhofer.dehttps://www.imws.fraunhofer.de/en/specials/tof----sims/frequently-asked-questions-about-tof-sims.html