Definition
An unintended high-energy electrical discharge in a plasma-processing environment, occurring through the gas or between surfaces at different electrical potentials.
Application
Monitored in plasma etch and other plasma tools because arc events can damage wafers, electrostatic chucks or chamber components and can indicate particles, abnormal plasma conditions or electrical faults.
Related search terms
Plasma arc; electrical arcing
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Related concepts
Evidence and further reading
- Evidence from doi.orghttps://doi.org/10.1149/1.3694430
- Evidence from patents.google.comhttps://patents.google.com/patent/US8158017B2/en